Vertical gate semiconductor device with steep subthreshold slope

ABSTRACT

A semiconductor device includes a substrate, a well on the substrate and an FFT on the well. The FET includes a first source/drain, a vertical channel layer, a gate structure, a second source/drain and a body structure. The first source/drain is on the well. The vertical channel layer extends form the first source/drain. The first gate structure surrounds a first portion of sidewalls of the vertical channel layer. The second source/drain is on the vertical channel layer. The body structure is in physical contact with the vertical channel layer. The body structure and the vertical channel layer constitute a bipolar device.

BACKGROUND

As the semiconductor industry has progressed into nanometer technologynodes in pursuit of higher device density, higher performance, and lowercosts, challenges from both fabrication and design issues have resultedin the development of three-dimensional designs, such as a vertical gateall around (VGAA) transistor. A typical VGAA transistor enables enhancedcontrol of the charge carriers along the lengthwise direction through acomplete encirclement of the channel region of a semiconductor nanowireby a gate dielectric and a gate electrode. The VGAA transistor has areduced short channel effect (e.g. compared to a planar transistor),because the channel region may be surrounded by the gate electrode sothat an effect of the source/drain region on an electric field of thechannel region may be reduced (e.g. relative to a planar transistor). Onthe other hand, a subthreshold drain current of a field effecttransistor (FET) is the current that flows between the source and drainof the FET when the transistor is in a subthreshold region (where thegate-to-source voltage is below the threshold voltage). A steepsubthreshold slope of the FET may improve the on and off current ratio,and therefore reduces a leakage current.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1A and FIG. 1B are schematic cross-sectional views of asemiconductor device in accordance with some embodiments of the presentdisclosure.

FIG. 2 to FIG. 26 are schematic cross-sectional views of intermediatestages in the formation of a semiconductor device in accordance withsome embodiments of the present disclosure.

FIG. 27 is a schematic cross-sectional view of a semiconductor device inaccordance with some embodiments of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact.

Terms used herein are only used to describe the specific embodiments,which are not used to limit the claims appended herewith. For example,unless limited otherwise, the term “one” or “the” of the single form mayalso represent the plural form. In addition, the present disclosure mayrepeat reference numerals and/or letters in the various examples. Thisrepetition is for the purpose of simplicity and clarity and does not initself dictate a relationship between the various embodiments and/orconfigurations discussed. The spatially relative terms are intended toencompass different orientations of the device in use or operation inaddition to the orientation depicted in the figures. The device may beotherwise oriented (rotated 90 degrees or at other orientations) and thespatially relative descriptors used herein may likewise be interpretedaccordingly.

It will be understood that, although the terms “first,” “second,”“third,” “fourth,” “fifth,” “sixth,” etc., may be used in the claims todescribe various elements and/or features, these elements and/orfeatures should not be limited by these terms, and these elements and/orfeatures correspondingly described in the embodiments are presented bydifferent reference numbers. These terms are used to distinguish oneelement and/or feature from another. For example, a first element couldbe termed a second element, and, similarly, a second element could betermed a first element, without departing from the scope of theembodiments. As used herein, the term “and/or” includes any and allcombinations of one or more of the associated listed items.

Further, spatially relative terms, such as “upper,” “lower,” “above,”“on,” and the like, may be used herein for ease of description todescribe one element or feature's relationship to another element(s) orfeature(s) as illustrated in the figures. The spatially relative termsare intended to encompass different orientations of the device in use oroperation in addition to the orientation depicted in the figures. Theapparatus may be otherwise oriented (rotated 90 degrees or at otherorientations) and the spatially relative descriptors used herein maylikewise be interpreted accordingly.

The gate all around (GAA) transistor structures may be patterned by anysuitable method. For example, the structures may be patterned using oneor more photolithography processes, including double-patterning ormulti-patterning processes. Generally, double-patterning ormulti-patterning processes combine photolithography and self-alignedprocesses, allowing patterns to be created that have, for example,pitches smaller than what is otherwise obtainable using a single, directphotolithography process. For example, in one embodiment, a sacrificiallayer is formed over a substrate and patterned using a photolithographyprocess. Spacers are formed alongside the patterned sacrificial layerusing a self-aligned process. The sacrificial layer is then removed, andthe remaining spacers may then be used to pattern the GAA structure.

Embodiments of the present disclosure are directed to a semiconductordevice, in which a novel body structure is provided for a vertical fieldeffect transistor (FET). Such body structure includes a P-N junction (oran N-P junction) where a body bias can be applied to improve asubthreshold slope steep of the vertical FET, so as to boost the deviceperformance of the vertical FET with a certain back bias applied to thebody structure.

FIG. 1A and FIG. 1B are schematic cross-sectional diagrams of asemiconductor device 100 in accordance with some embodiments. Thesemiconductor device 100 may be a P-type or N-type device, such as aP-type/N-type FET. As shown in FIG. 1A and FIG. 1B, in the semiconductordevice 100 a substrate 102 is provided, which may be a semiconductorsubstrate, such as a bulk semiconductor, a semiconductor-on-insulator(SOI) substrate, or the like. In a case of SOI substrate, asemiconductor material layer is formed on an insulator layer. Theinsulator layer may be, for example, a buried oxide (BOX) layer, asilicon oxide layer, or the like, and may be provided on a substratesuch as a silicon substrate and a glass substrate. Another substrate,such as a multi-layered and a gradient substrate, may also be used. Insome embodiments, the semiconductor material layer may include, forexample, silicon, germanium, silicon carbide (SiC), silicon germanium(SiGe), gallium arsenide (GaAs), gallium phosphide (GaP), galliumarsenide phosphide (GaAsP), indium arsenide (InAs), indium phosphide(InP), indium antimonide (InSb), aluminum indium arsenide (AlinAs),aluminum gallium arsenide (AlGaAs), gallium indium arsenide (GaInAs),gallium indium phosphide (GaInP), gallium indium arsenide phosphide(GaInAsP), combinations thereof, or another suitable material.

A semiconductor layer 104 is on the substrate 102. The semiconductorlayer 104 may include dopants of appropriate types and concentrations.In the embodiments where the semiconductor device 100 is a P-type FET,the semiconductor layer 104 may include N-type dopants, such asphosphorus, antimony, arsenic, and/or the like. Oppositely, in theembodiments where the semiconductor device 100 is an N-type FET, thesemiconductor layer 104 may include P-type dopants, such as boron,gallium, indium, and/or the like. A dopant concentration of thesemiconductor layer 104 may be about 10¹³ atoms/cm³ to about 10¹⁶atoms/cm³. In some embodiments, a thickness T1 of the semiconductorlayer 104 is about 30 nm.

A semiconductor layer 106 is on the semiconductor layer 104. In theembodiments where the semiconductor device 100 is a P-type FET, thesemiconductor layer 106 may include P-type dopants, such as boron, boronfluorine, silicon, germanium, carbon, zinc, cadmium, beryllium,magnesium, indium, combinations thereof, and/or the like. Oppositely, inthe embodiments where the semiconductor device 100 is an N-type FET, thesemiconductor layer 106 may include N-type dopants, such as phosphorus,arsenic, antimony, silicon, germanium, carbon, oxygen, sulfur, selenium,tellurium, combinations thereof, and/or the like. A dopant concentrationof the semiconductor layer 106 may be about 10¹⁸ atoms/cm³ to about 10²²atoms/cm³. In some embodiments, a thickness T2 of the semiconductorlayer 106 is about 20 nm to about 30 nm.

A dielectric layer 108 is on the substrate 102 and surrounds thesemiconductor layer 104 and the semiconductor layer 106. The dielectriclayer 108 may include flowable oxide. For example, the dielectric layer108 may include phosphosilicate glass (PSG), borosilicate glass (BSG),boron-doped phosphosilicate glass (BPSG), tetraethyl orthosilicate(TEOS) oxide, titanium nitride, silicon oxycabride (SiOC), or anotherlow-k nonporous dielectric material. As shown in FIG. 1A, a portion ofthe dielectric layer 108 is a shallow trench isolation (STI) 108A whichseparates portions of the semiconductor layer 104 and the semiconductorlayer 106; a well 104A of the semiconductor layer 104 and a firstsource/drain structure 106A of the semiconductor layer 106 are at theleft side of the STI 108A, and a body well 104B of the semiconductorlayer 104 and the other portion of the semiconductor layer 106 (denotedas semiconductor layer 106B) are at the right side of the STI 108A. Insome embodiments, a thickness T3 of the STI 108A is about 50 nm.

A silicide feature 110 is on the first source/drain structure 106A forelectrically connection with another device. The silicide feature 110may include a conductive film (not shown) on a portion of the firstsource/drain structure 106A. In some embodiments, the conductive filmmay include a conductive material, for example, titanium, nickel,platinum, cobalt, combinations thereof, or the like. The material of theconductive film may be diffused into the semiconductor layer 106 byusing an annealing process. The silicide feature 110 may include acombination of the materials of the semiconductor layer 106 and theconductive film. In some embodiments, a thickness T4 of the silicidefeature 110 is about 10 nm to about 20 nm.

A vertical channel layer 112 is above and in contact with the firstsource/drain structure 106A, and extends vertically from the firstsource/drain structure 106A. The vertical channel layer 112 may includea material, such as silicon, silicon phosphide (SiP), silicon phosphoriccarbide (SiPC), silicon germanium, silicon germanium boron (SiGeB),germanium, germanium boron (GeB), germanium phosphoric (GeP), a III-Vmaterial such as indium phosphoric, gallium arsenide, aluminum arsenide(AlAs), indium arsenide, aluminum indium arsenide, gallium indiumarsenide, indium antimonide, gallium antimonide (GaSb) and indiumgallium antimonide (InGaSb), combinations thereof, and/or the like. Inthe embodiments where the semiconductor device 100 is a P-type FET, thevertical channel layer 112 may include N-type dopants, such asphosphorus, arsenic, silicon, germanium, carbon, oxygen, sulfur,selenium, tellurium, antimony, combinations thereof, and/or the like.Oppositely, in the embodiments where the semiconductor device 100 is anN-type FET, the vertical channel layer 112 may include P-type dopants,such as boron, boron fluoride (BF2), silicon, germanium, carbon, zinc,cadmium, beryllium, magnesium, indium, combinations thereof, and/or thelike. A dopant concentration of the vertical channel layer 112 may beabout 10¹² atoms/cm³ to about 10¹⁸ atoms/cm³, depending on variousthreshold voltage design requirements. In certain embodiments, thevertical channel layer 112 may be even undoped. In some embodiments, athickness T5 and a width W1 of the vertical channel layer 112 are about20-40 nm and about 5-10 nm, respectively.

A gate structure 114 surrounds a portion of sidewalls of the verticalchannel layer 112. The gate structure 114 may include a gate dielectriclayer and a gate electrode layer. The gate dielectric layer may beformed from a high-k material, such as nitride-based dielectric, siliconoxynitride, hafnium oxide, tantalum oxide, titanium oxide, zirconiumoxide, aluminum oxide, yttrium oxide, lanthanum oxide, combinationsthereof, and/or another suitable material. The gate electrode layer maybe formed from polysilicon and a metallic material (such as titanium,tantalum, tungsten, aluminum, molybdenum, platinum and hafnium), a metalsilicide material (such as titanium silicide, tantalum silicide,tungsten silicate, molybdenum silicate, nickel silicide and cobaltsilicide), a metal nitride material (such as titanium nitride, tantalumnitride, tungsten nitride, molybdenum silicate, nickel nitride andcobalt nitride), silicide metal nitride (such as titanium siliconnitride, tantalum silicon nitride and tungsten silicon nitride),refractory metals, polysilicon, combinations thereof, and/or anothersuitable material. The gate structures 238A and 238B may be doped withmetal dopants to have different work function values. In someembodiments, the gate electrode layer of the gate structure may includemetal dopants of a particular concentration to have a desired workfunction value. The gate structure 114 may extend horizontally from thevertical channel layer 112. In some embodiments, a vertical length T6 ofthe gate structure 114 may be about 20 nm to about 30 nm.

A second source/drain structure 116 is above and in contact with thevertical channel layer 112. The second source/drain structure 116 is asemiconductor structure, which may be formed by epitaxially growing asemiconductor material, such as silicon, germanium, silicon germanium,silicon carbide, silicon phosphide, silicon phosphoric carbide, a III-Vmaterial such as indium phosphoric, gallium arsenide, aluminiumarsenide, indium arsenide, aluminium indium arsenide, gallium indiumarsenide, indium antimonide, gallium antimonide and indium galliumantimonide, combinations thereof, or the like. In the embodiments wherethe semiconductor device 100 is a P-type FET, the second source/drainstructure 116 may include P-type dopants, such as boron, boron fluorine,silicon, germanium, carbon, zinc, cadmium, beryllium, magnesium, indium,combinations thereof, and/or the like. Oppositely, in the embodimentswhere the semiconductor device 100 is an N-type FET, the secondsource/drain structure 116 may include N-type dopants, such asphosphorus, arsenic, antimony, silicon, germanium, carbon, oxygen,sulfur, selenium, tellurium, combinations thereof, and/or the like. Insome embodiments, a thickness T7 of the second source/drain structure116 is about 20 nm to about 30 nm. In addition, the first source/drainstructure 106A and the second source/drain structure 116 may have thesame or different materials and/or the same or different dopants.

A body structure is in contact with the vertical channel layer 112 andopposite to the gate structure 114. In detail, the body structureincludes a body epitaxial layer 118 and a body terminal 120. The bodyepitaxial layer 118 borders the other portion of the sidewalls of thevertical channel layer 112 that is not surrounded by the gate structure114. In the embodiments where the semiconductor device 100 is a P-typeFET, the body epitaxial layer 118 may include essential germanium orsilicon germanium and may be implanted with P-type dopants, such asboron, boron fluorine, aluminum, gallium, indium, combinations thereof,and/or the like. Oppositely, in the embodiments where the semiconductordevice 100 is an N-type FET, the body epitaxial layer 118 may includeessential silicon and may be implanted with N-type dopants, such asphosphorus, arsenic, antimony, combinations thereof, and/or the like. Adopant concentration of the body epitaxial layer 118 may be about 10¹⁸atoms/cm³ to about 10²² atoms/cm³, depending on various thresholdvoltage design requirements. In some embodiments, a thickness T8 and awidth W2 of the body epitaxial layer 118 is about 20 nm and about 10-30nm, respectively.

The body terminal 120 is in contact with the body epitaxial layer 118and on the semiconductor layer 106B. As shown in FIG. 1A, thesemiconductor layer 106B and the body well 104B form a bar structure forsupporting the body terminal 120. The body terminal 120 may include, forexample, silicon, silicon phosphide, silicon phosphoric carbide, silicongermanium, silicon germanium boron, germanium, germanium boron,germanium phosphoric, a III-V material such as indium phosphoric,gallium arsenide, aluminum arsenide, indium arsenide, aluminum indiumarsenide, gallium indium arsenide, indium antimonide, gallium antimonideand indium gallium antimonide, combinations thereof, or the like. In theembodiments where the semiconductor device 100 is a P-type FET, the bodyterminal 120 may include N-type dopants, such as phosphorus, arsenic,silicon, germanium, carbon, oxygen, sulfur, selenium, tellurium,antimony, combinations thereof, and/or the like. Oppositely, in theembodiments where the semiconductor device 100 is an N-type FET, thebody terminal 120 may include P-type dopants, such as boron, boronfluoride, silicon, germanium, carbon, zinc, cadmium, beryllium,magnesium, indium, combinations thereof, and/or the like. In someembodiments, a dopant concentration of the body terminal 120 may beabout 10¹⁸ atoms/cm³ to about 1022 atoms/cm³, depending on variousthreshold voltage design requirements. In certain embodiments, athickness and a width of the body terminal 120 are substantially thesame as the thickness T5 and the width W1 of the vertical channel layer112, respectively.

A semiconductor structure 122 is above and in contact with the bodyterminal 120. The semiconductor structure 122 may be formed byepitaxially growing a semiconductor material, such as silicon,germanium, silicon germanium, silicon carbide, silicon phosphide,silicon phosphoric carbide, a III-V material such as indium phosphoric,gallium arsenide, aluminum arsenide, indium arsenide, aluminum indiumarsenide, gallium indium arsenide, indium antimonide, gallium antimonideand indium gallium antimonide, combinations thereof, or the like. In theembodiments where the semiconductor device 100 is a P-type FET, thesemiconductor structure 122 may include P-type dopants, such as boron,boron fluorine, silicon, germanium, carbon, zinc, cadmium, beryllium,magnesium, indium, combinations thereof, and/or the like. Oppositely, inthe embodiments where the semiconductor device 100 is an N-type FET, thesemiconductor structure 122 may include N-type dopants, such asphosphorus, arsenic, antimony, silicon, germanium, carbon, oxygen,sulfur, selenium, tellurium, combinations thereof, and/or the like. Insome embodiments, a thickness of the semiconductor structure 122 issubstantially the same as the thickness T7 of the second source/drainstructure 116. In addition, the first source/drain structure 106A andthe second source/drain structure 116 may have the same or differentmaterials and/or the same or different dopants.

In some embodiments, as shown in FIG. 1A, a liner layer 124 is partiallyconformal to the first source/drain structure 106A, the vertical channellayer 112, the semiconductor layer 106B and the body terminal 120. Theliner layer 124 may include, for example, silicon nitride, siliconcarbide, silicon carbon nitride, silicon oxycarbonitride, combinationsthereof, or the like.

Silicide features 126 and 128 respectively surround the secondsource/drain structure 116 and the semiconductor structure 122 forelectrically connection with another device. Each of the silicidefeatures 126 and 128 may include a conductive material, for example,titanium, nickel, platinum, cobalt, combinations thereof, or the like.In some embodiments, a thickness of each of the silicide features 126and 128 is about 10 nm to about 20 nm.

As shown in FIG. 1B, interconnect features 130 and 132 are above and incontact with the silicide features 110 and 126, respectively, forelectrically coupling the first source/drain structure 106A and thesecond source/drain structure 116 with external devices. Each of theinterconnect features 130 and 132 may include one or more layers ofmetal lines and/or vias. The interconnect features 130 and 132 mayinclude a conductive material such as copper, aluminum, nickel,titanium, tungsten, combinations thereof, and/or another suitableconductive material.

The semiconductor device 100 may further include one or more hard masklayers 134 in its structure. The hard mask layers 134 may include one ormore dielectric materials, such as silicon oxide (SiO), silicon nitride(SiN), silicon oxynitride (SiON), silicon carbon nitride (SiCN), siliconoxycarbonitride (SiOCN), titanium nitride, and/or the like.

From the structure shown in FIG. 1A, the body structure (including thebody epitaxial layer 118 and the body terminal 120) and the verticalchannel layer 112 constitute a bipolar device. In the embodiments wherethe semiconductor device 100 is a P-type FET, the body structure and thevertical channel layer 112 constitute an NPN bipolar junction transistor(BJT) structure; in the embodiments where the semiconductor device 100is an N-type FET, the body structure and the vertical channel layer 112constitute a PNP BJT structure. With such bipolar structure, thesubthreshold steep of the semiconductor device 100 is advantageouslyimproved, and therefore the semiconductor device 100 is suitable for alow power application.

FIG. 2 to FIG. 26 illustrate cross-sectional views of variousintermediary steps of forming a semiconductor device in accordance withvarious embodiments.

In FIG. 2, a substrate 202 is illustrated. The substrate 202 may be asemiconductor substrate, such as a bulk semiconductor, an SOI substrate,or the like. In a case of SOI substrate, a semiconductor material layeris formed on an insulator layer which may be, for example, a BOX layer,a silicon oxide layer, or the like. The insulator layer is provided on asubstrate, typically a silicon substrate or a glass substrate. Anothersubstrate, such as a multi-layered or gradient substrate may also beused. In some embodiments, the semiconductor material layer may beformed from, for example, silicon, germanium, silicon carbide, silicongermanium, gallium arsenide, gallium phosphide, gallium arsenidephosphide, indium arsenide, indium phosphide, indium antimonide,aluminum indium arsenide, aluminum gallium arsenide, gallium indiumarsenide, gallium indium phosphide, gallium indium arsenide phosphide,combinations thereof, or another suitable material.

The substrate 202 includes a P-type device region 202A and an N-typedevice region 202B, and an N-type well 204A and a P-type well 204B onthe substrate 202 are respectively in the P-type device region 202A andthe N-type device region 202B. The N-type well 204A and the P-type well204B may be formed, for example, by implanting dopants of appropriatetypes and concentrations into the substrate 202. For example, N-typedopants, such as phosphorus, antimony, arsenic, and/or the like, may beimplanted into the substrate 202 with a concentration of about 10¹³atoms/cm³ to about 10¹⁶ atoms/cm³ to form the N-type well 204A, andP-type dopants, such as boron, gallium, indium, and/or the like, may beimplanted into the substrate 202 with a concentration of about 10¹³atoms/cm³ to about 10¹⁶ atoms/cm³ to form the P-type well 204B.

Semiconductor layers 206A and 206B are formed on the N-type well 204Aand the P-type well 204B, respectively. The semiconductor layer 206A maybe formed from, for example, silicon, germanium, silicon germanium,germanium boron, silicon germanium boron, a III-V material (such asindium antimonide, gallium antimonide, indium gallium antimonide),combinations thereof, or the like. The semiconductor layer 206B may beformed from, for example, silicon, silicon phosphide, silicon phosphidecarbide, germanium, germanium phosphide, a III-V material (such asindium phosphide, aluminum arsenide, gallium arsenide, indium arsenide,gallium indium arsenide and aluminum indium arsenide), combinationsthereof, or the like. Each of the semiconductor layers 206A and 206B maybe formed by using an epitaxy process, such as a metal-organic (MO)chemical vapor deposition (CVD) process, a liquid phase epitaxy (LPE)process, a vapor phase epitaxy (VPE) process, a molecular beam epitaxy(MBE) process, a selective epitaxial growth (SEG) process, combinationsthereof, and/or another suitable process. Then, the semiconductor layers206A and 206B are doped with dopants of appropriate types andconcentrations. For example, P-type dopants, such as boron, boronfluorine, silicon, germanium, carbon, zinc, cadmium, beryllium,magnesium, indium, combinations thereof, and/or the like, may beimplanted into the semiconductor layer 206A with a concentration ofabout 10¹⁸ atoms/cm³ to about 10²² atoms/cm³, and N-type dopants, suchas phosphorus, arsenic, antimony, silicon, germanium, carbon, oxygen,sulfur, selenium, tellurium, combinations thereof, and/or the like, maybe implanted into the semiconductor layer 206B with a concentration ofabout 10¹⁸ atoms/cm³ to about 10²² atoms/cm³.

Channel layers 208A and 208B are formed on the semiconductor layers 206Aand 206B, respectively. Each of the channel layers 208A and 208B may beformed from, for example, silicon, silicon phosphoric, siliconphosphoric carbide, silicon germanium, silicon germanium boron,germanium, germanium boron, germanium phosphoric, a III-V material suchas indium phosphoric, gallium arsenide, aluminum arsenide, indiumarsenide, aluminum indium arsenide, gallium indium arsenide, indiumantimonide, gallium antimonide and indium gallium antimonide,combinations thereof, or the like. Each of the channel layers 208A and208B may be formed by using an epitaxy process, such as an MO CVD(MOCVD) process, an LPE process, a VPE process, an MBE process, an SEGprocess, combinations thereof, and/or another suitable process.

The channel layers 208A and 208B may be formed including differentmaterials, different dopants, and/or different doping concentrations,depending on various device design requirements. For example, thechannel layer 208A may be lightly doped with N-type dopants, such asphosphorus, arsenic, silicon, germanium, carbon, oxygen, sulfur,selenium, tellurium, antimony, combinations thereof, and/or the like,while the channel layer 208B may be lightly doped with P-type dopants,such as boron, boron fluoride, silicon, germanium, carbon, zinc,cadmium, beryllium, magnesium, indium, combinations thereof, and/or thelike. In some embodiments, a dopant concentration of the each of thechannel layers 208A or 208B may be about 10¹² atoms/cm³ to about 10¹⁸atoms/cm³, depending on various threshold voltage design requirements.In certain embodiments, each of the channel layers 208A or 208B may beeven undoped.

A hard mask layer 210 is formed over the channel layers 208A and 208B.The hard mask layer 210 may be formed from one or more dielectricmaterials, such as silicon oxide, silicon nitride, silicon oxynitride,silicon carbon nitride, silicon oxycarbonitride, titanium nitride,and/or the like. The hard mask layer 210 may be formed by using one ormore processes, such as a CVD process, a low pressure CVD (LPCVD)process, a plasma enhanced CVD (PECVD) process, a physical vapordeposition (PVD) process, an atomic layer deposition (ALD) process, aspin-on coating process, a sputtering process, a thermal oxidationprocess, combinations thereof, and/or the like.

After the formation of the hard mask layer 210, an etching operation isperformed to remove a portion of the hard mask layer 210, a portion ofthe channel layer 208A, a portion of the channel layer 208B, a portionof the semiconductor layer 206A and a portion of the semiconductor layer206B. The etching operation to the hard mask layer 210, the channellayers 208A and 208B and the semiconductor layers 206A and 206B mayinclude reactive ion etching process, a plasma etching process, a dryetching process, a wet etching process, combinations thereof, or anothersuitable etching process. As shown in FIG. 3, after the etchingoperation, the remained hard mask layer 210, the remained verticalchannel layers 208A and 208B and a portion of the remained semiconductorlayers 206A and 206B form vertical bar structures.

Referring next to FIG. 3, a liner layer 212 is formed over the hard masklayer 210, the vertical channel layers 208A and 208B and thesemiconductor layers 206A and 206B. The liner layer 212 may be formedfrom, for example, silicon nitride, silicon carbide, silicon carbonnitride, silicon oxycarbonitride, combinations thereof, or the like, andmay be formed by a deposition process (such as a CVD process, a PVDprocess and an ALD process) and a thermal oxidation process. Then, aportion of the liner layer 212 above the hard mask layer 210 is removedby performing, for example, a dry etching process such as a plasmaetching process, or another suitable etching process.

In FIG. 4, a patterned photoresist (not shown) is formed over the hardmask layer 210 and the liner layer 212 to define trench portions. Thepatterned photoresist (not shown) is formed including a photoresistmaterial that is sensitive to light, X-ray, an electron beam, an ionbeam, or other suitable radiation source, depending on the type ofpatterning operation for the patterned photoresist (not shown). In someembodiments, the patterned photoresist (not shown) is formed by using aspin-on coating process and a maskless lithography process, such ase-beam direct writing and another suitable process. Then, the portionsof the liner layer 212, the semiconductor layers 206A and 206B, theN-type well 204A, the P-type well 204B and the substrate 202 uncoveredby the patterned photoresist (not shown) are removed or etched byperforming an etching operation to form trenches 216 which expose thesubstrate 202. The etching operation may include reactive ion etchingprocess, a plasma etching process, a dry etching process, a wet etchingprocess, combinations thereof, or another suitable etching process. Thetrenches 216 may be in the P-type device region 202A, in the N-typedevice region 202B and at the boundary between the P-type device region202A and the N-type device region 202B, respectively. After the etchingoperation, the patterned photoresist (not shown) is removed by, forexample, a wet stripping process and/or plasma ashing process, such asan oxygen plasma ashing process and another suitable process, and then afurther etching process may be optionally performed to thinner the hardmask layer 210.

In FIG. 5, a dielectric layer 218 is formed over the substrate 202, theN-type well 204A, the P-type well 204B, the semiconductor layers 206Aand 206B, the hard mask layer 210 and the liner layer 212 to fill thetrenches 216. The dielectric layer 218 may be formed from a flowableoxide by using a flowable CVD process or another suitable process.

In FIG. 6, a portion of the dielectric layer 218 above the hard masklayer 210 and the liner layer 212 is removed by using, for example, achemical mechanical polishing (CMP) process or another suitableplanarization process, in order to planarize the dielectric layer 218for subsequent operations.

In FIG. 7, a hard mask layer 220 is formed over the hard mask layer 210,the liner layer 212 and the dielectric layer 218, and then a patternedphotoresist 222 is formed on the hard mask layer 220 to define etchingregions of the hard mask layer 220. As shown in FIG. 7, each of theetching portions of the hard mask layer 220 is vertically between twoneighboring vertical bar structures. The hard mask layer 220 may beformed from one or more dielectric materials, such as silicon oxide,silicon nitride, silicon oxynitride, silicon carbon nitride, siliconoxycarbonitride, titanium nitride, and/or the like. The hard mask layer220 may be formed by using one or more processes, such as a CVD process,an LPCVD process, a PECVD process, a PVD process, an ALD process, aspin-on coating process, a sputtering process, a thermal oxidationprocess, combinations thereof, and/or the like. The patternedphotoresist 222 is formed including a photoresist material that issensitive to light, X-ray, an electron beam, an ion beam, or othersuitable radiation source, depending on the type of patterning operationfor the patterned photoresist 222. In some embodiments, the patternedphotoresist 222 is formed by using a spin-on coating process and amaskless lithography process, such as an e-beam direct writing processand another suitable process. Then, the etching portions of the hardmask layer 220 uncovered by the patterned photoresist 222 are removed toform openings 220A and 220B respectively in the P-type device region202A and the N-type device region 202B. The etching operation mayinclude reactive ion etching process, a plasma etching process, a dryetching process, a wet etching process, combinations thereof, or anothersuitable etching process.

In FIG. 8, portions of the dielectric layer 218 uncovered by the hardmask layer 220 (i.e. below the openings 220A and 220B) are etched toformed spaces 224A and 224B respectively in the P-type device region202A and the N-type device region 202B by using an etching process, suchas a wet etching, a dry etching process and another suitable process.After the etching process, a top surface of a portion of the dielectriclayer 218 vertically below the space 224A is in a vertical level betweena top surface and a bottom surface of the vertical channel layer 208A,and a top surface of another portion of the dielectric layer 218vertically below the space 224B is in a vertical level between a topsurface and a bottom surface of the vertical channel layer 208B. Theportions of the dielectric layer 218 uncovered by the hard mask layer220 may be etched to have the same target height or various targetheights depending on various desire requirements. In other words, thespaces 224A and 224B may have the same depth or various depths dependingon various desire requirements. After the etching process, the hard masklayer 220 is then removed by using, for example, a wet etching process,a dry etching process, a plasma ashing processes, a CMP process, oranother suitable processes.

In FIG. 9, body epitaxial layers 226A and 226B are formed in the spaces224A and 224B, respectively. Each of the body epitaxial layers 226A and226B may be formed by an in-situ epitaxial growth process or anothersuitable epitaxial growth process. The body epitaxial layer 226A may beformed from essential germanium or silicon germanium, and may beimplanted with P-type dopants, such as boron, boron fluorine, aluminum,gallium, indium, combinations thereof, and/or the like. The bodyepitaxial layer 226B may be formed from essential silicon, and may beimplanted with N-type dopants, such as phosphorus, arsenic, antimony,combinations thereof, and/or the like.

In FIG. 10, an etching back operation is performed on the body epitaxiallayers 226A and 226B to reduce the thicknesses of the body epitaxiallayers 226A and 226B respectively to desired thicknesses. In someembodiments, the body epitaxial layers 226A and 226B are respectivelyetched back by using one or more epitaxial growth processes and one ormore etching back processes, such as a dry etching process, a wetetching process, combinations thereof, and/or the like.

In FIG. 11, a dielectric layer 228 is formed over the body epitaxiallayers 226A and 226B to fill the spaces 224A and 224B. The dielectriclayer 228 may be formed from a flowable oxide by using a flowable CVDprocess or another suitable process.

In FIG. 12, a patterned hard mask layer 230 is formed over the hard masklayer 210, the liner layer 212 and the dielectric layers 218 and 228. Asshown in FIG. 12, in the P-type device region 202A, the vertical channellayer 208A, the hard mask layer 210, the liner layer 212, a portion ofthe dielectric layer 218, the body epitaxial layer 226A and thedielectric layer 228 are covered by the patterned hard mask layer 230,while the semiconductor layer 206A is partially exposed; in the N-typedevice region 202B, the vertical channel layer 208B, the hard mask layer210, the liner layer 212, another portion of the dielectric layer 218,the body epitaxial layer 226B and the dielectric layer 228 are coveredby the patterned hard mask layer 230, while the semiconductor layer 206Bis partially exposed. The patterned hard mask layer 230 may be formedfrom one or more dielectric materials, such as silicon oxide, siliconnitride, silicon oxynitride, silicon carbon nitride, siliconoxycarbonitride, titanium nitride, and/or the like. The patterned hardmask layer 230 may be formed by using a deposition (such as a CVDprocess, an LPCVD process, a PECVD process, a PVD process, an ALDprocess, a spin-on coating process, a sputtering process, a thermaloxidation process, combinations thereof, and/or the like) and an etchingprocess (such as a reactive ion etching process, a plasma etchingprocess, a dry etching process, a wet etching process, combinationsthereof, and/or the like).

In FIG. 13, silicide features 232A and 232B are respectively formed on aportion of the semiconductor layer 206A and a portion of thesemiconductor layer 206B uncovered by the dielectric layer 218. Thesilicide features 232A and 232B may be formed by first depositing aconductive film (not shown) on the exposed portions of the semiconductorlayers 206A and 206B. In some embodiments, the conductive film may beformed from, for example, titanium, nickel, platinum, cobalt,combinations thereof, or the like. After depositing the conductive film,an annealing process may be performed to cause the diffusion of thematerial of the conductive film into the semiconductor layers 206A and206B. The annealing process may be performed by using argon or nitrogenas a process gas under an environment in which the temperature is about100° C. to about 900° C. and the atmospheric pressure is about 770 Torrsto about 850 Torrs. The silicide feature 232A may include a combinationof the materials of the semiconductor layer 206A and the conductivefilm, and the silicide feature 232B may include a combination of thematerials of the semiconductor layer 206B and the conductive film.

In FIG. 14, a hard mask layer 234 is formed over the hard mask layer210, the liner layer 212, the dielectric layers 218 and 228, the hardmask layer 230 and the silicide features 232A and 232B, and a dielectriclayer 236 is formed over the hard mask layer 234. The hard mask layer234 may be formed from one or more dielectric materials, such as siliconoxide, silicon nitride, silicon oxynitride, silicon carbon nitride,silicon oxycarbonitride, titanium nitride, and/or the like, and may beformed by using one or more processes, such as a CVD process, an LPCVDprocess, a PECVD process, a PVD process, an ALD process, a spin-oncoating process, a sputtering process, a thermal oxidation process,combinations thereof, and/or the like. The dielectric layer 236 may beformed from a flowable oxide by using a flowable CVD process or anothersuitable process.

In FIG. 15, a portion of the dielectric layer 236 is removed by usingone or more processes, such as a CMP process, an etching back process,combinations thereof, and/or the like. Particularly, a CMP process isfirst performed to planarize the dielectric layer 236, such that a topsurface of the dielectric layer 236 is leveled with a top surface of thehard mask layer 234 above the hard mask layer 230, and an etching backprocess, such as a wet etching, a dry etching process and/or anothersuitable process, is then performed to reduce the height of thedielectric layer 236 to a desired height.

In FIG. 16, a portion of the hard mask layer 234 above a top surface ofthe remained dielectric layer 236, a portion of the hard mask layer 230and a portion of the liner layer 212 are removed by using one or moreetching process, such as a reactive ion etching process, a plasmaetching process, a dry etching process, a wet etching process,combinations thereof, and/or another suitable etching process. After theetching process, as shown in FIG. 16, a portion of a sidewall of each ofthe vertical channel layers 208A and 208B is exposed.

In FIG. 17, a gate stack 238 is formed over the vertical channel layers208A and 208B, the hard mask layers 210, 230 and 234, and the dielectriclayers 218 and 236. The gate stack 238 may include a gate dielectriclayer and a gate electrode layer. The gate dielectric layer may beformed from a high-k material, such as nitride-based dielectric, siliconoxynitride, hafnium oxide, tantalum oxide, titanium oxide, zirconiumoxide, aluminum oxide, yttrium oxide, lanthanum oxide, combinationsthereof, and/or another suitable material, and may be formed by using anALD process, a CVD process, a PVD process, a thermal oxidation process,a UV-ozone oxidation process, combinations thereof, or the like.Moreover, an interfacial layer of silicon oxide may be further formedbetween the high-k dielectric layer and the vertical channel layers 208Aand 208B, in order to reduce damages between the gate dielectric layerand lateral contact surfaces of the vertical channel layers 208A and208B. The gate electrode layer may be formed from polysilicon and ametallic material (such as titanium, tantalum, tungsten, aluminum,molybdenum, platinum and hafnium), a metal silicide material (such astitanium silicide, tantalum silicide, tungsten silicate, molybdenumsilicate, nickel silicide and cobalt silicide), a metal nitride material(such as titanium nitride, tantalum nitride, tungsten nitride,molybdenum silicate, nickel nitride and cobalt nitride), silicide metalnitride (such as titanium silicon nitride, tantalum silicon nitride andtungsten silicon nitride), refractory metals, polysilicon, combinationsthereof, and/or another suitable material, and may be formed by using,for example, a PVD process, a CVD process, an LPCVD process, an ALDprocess, a spin-on deposition process, a plating process, combinationsthereof, or another suitable process.

In FIG. 18, an unwanted portion of the gate stack 238 is removed by apatterning process including a photolithography process and an etchingprocess, such as a reactive ion etching (ME) process or another suitableprocess, and therefore gate structures 238A and 238B are respectivelyformed in the P-type device region 202A and in the N-type device region202B. The gate structures 238A and 238B may be doped with metal dopantsto have different work function values. In some embodiments, one or eachof the gate structures 238A and 238B includes one or more work functionlayers.

In FIG. 19, a hard mask layer 240 is formed over the dielectric layers218 and 236, the hard mask layers 230 and 234, the silicide features232A and 232B and the gate structures 238A and 238B, and a dielectriclayer 242 is formed over the hard mask layer 240. The hard mask layer234 may be formed from one or more dielectric materials, such as siliconoxide, silicon nitride, silicon oxynitride, silicon carbon nitride,silicon oxycarbonitride, titanium nitride, and/or the like, and may beformed by using one or more processes, such as a CVD process, an LPCVDprocess, a PECVD process, a PVD process, an ALD process, a spin-oncoating process, a sputtering process, a thermal oxidation process,combinations thereof, and/or the like. The dielectric layer 242 may beformed from a flowable oxide by using a flowable CVD process or anothersuitable process.

In FIG. 20, portions of the gate structures 238A and 238B, the hard masklayer 240 and the dielectric layer 242 above a height level of thesemiconductor structure shown in FIG. 19 are removed by using one ormore etching process, such as a reactive ion etching process, a plasmaetching process, a dry etching process, a wet etching process,combinations thereof, and/or another suitable etching process, in orderto determine vertical lengths of the gate structures 238A and 238B. Atop end of the gate structure 238A may be lower than a top end of thevertical channel layer 208A, and a top end of the gate structure 238Bmay be lower than a top end of the vertical channel layer 208B. That is,portions of the vertical channel layers 208A and 208B are exposed afterthe etching process of FIG. 20. In certain embodiments, the gatestructures 238A and 238B have different vertical lengths.

In FIG. 21, a dielectric layer 244 is formed over the vertical channellayers 208A and 208B, the hard mask layers 210, 230 and 240, thedielectric layers 218 and 242 and the gate structures 238A and 238B. Thedielectric layer 244 may be formed from a flowable oxide by using aflowable CVD process or another suitable process.

In FIG. 22, the hard mask layers 210 and 230, a portion of the linerlayer 212 above the vertical channel layers 208A and 208B and a portionof the dielectric layer 244 above the vertical channel layers 208A and208B are removed by using one or more processes, such as a CMP process,an etching back process, combinations thereof, and/or the like. As shownin FIG. 22, top ends of the vertical channel layers 208A and 208B areexposed after the removing process of FIG. 22.

Optionally, in FIG. 23, a patterned photoresist 246 may be formed overthe vertical channel layers 208A and 208B and the dielectric layer 244to define a body implant portion of the vertical channel layer 208A andthe body epitaxial layer 226A. Then, an implant process is performed onthe body implant portion, so as to form a body terminal 248 in theP-type device region 202A. The body terminal 248 may be heavily dopedwith N-type dopants, such as phosphorus, arsenic, silicon, germanium,carbon, oxygen, sulfur, selenium, tellurium, antimony, combinationsthereof, and the like. In some embodiments, a dopant concentration ofthe body terminal 248 may be about 10¹⁸ atoms/cm³ to about 10²²atoms/cm³, depending on various threshold voltage design requirements.The patterned photoresist 246 is stripped after the body terminal 248 isformed.

Further, in FIG. 24, a patterned photoresist 250 may be formed over thevertical channel layers 208A and 208B and the dielectric layer 244 todefine a body implant portion of the vertical channel layer 208B and thebody epitaxial layer 226B. Then, an implant process is performed on thebody implant portion, so as to form a body terminal 225 in the N-typedevice region 202B. The body terminal 252 may be heavily doped withP-type dopants, such as phosphorus, arsenic, silicon, germanium, carbon,oxygen, sulfur, selenium, tellurium, antimony, combinations thereof, andthe like. In some embodiments, a dopant concentration of the bodyterminal 252 may be about 10¹⁸ atoms/cm³ to about 10²² atoms/cm³,depending on various threshold voltage design requirements. Thepatterned photoresist 250 is stripped after the body terminal 252 isformed.

In FIG. 25, a patterned hard mask layer 254 is formed over the verticalchannel layer 208B, the dielectric layers 218, 228 and 244 and the bodyterminal 248, and a dual epitaxial process is performed to formsemiconductor structures 256A and 256B respectively on the verticalchannel layer 208A and the body terminal 252. As shown in FIG. 25, thevertical channel layer 208A and the body terminal 252 are uncovered bythe patterned hard mask layer 254. The patterned hard mask layer 254 maybe formed from one or more dielectric materials, such as silicon oxide,silicon nitride, silicon oxynitride, silicon carbon nitride, siliconoxycarbonitride, titanium nitride, and/or the like. The semiconductorstructures 256A and 256B may be formed by epitaxially growing asemiconductor material, such as silicon, germanium, silicon germanium,silicon carbide, silicon phosphoric, silicon phosphoric carbide, a III-Vmaterial such as indium phosphoric, gallium arsenide, aluminum arsenide,indium arsenide, aluminum indium arsenide, gallium indium arsenide,indium antimonide, gallium antimonide and indium gallium antimonide,combinations thereof, or the like. In addition, the semiconductorstructure 256A may be doped or heavily doped with P-type dopants, suchas boron, boron fluoride, silicon, germanium, carbon, zinc, cadmium,beryllium, magnesium, indium, combinations thereof, and/or the like,while the semiconductor structure 256B may be doped or heavily dopedwith N-type dopants, such as phosphorus, arsenic, silicon, germanium,carbon, oxygen, sulfur, selenium, tellurium, antimony, combinationsthereof, and/or the like. The patterned hard mask layer 254 is removedafter the semiconductor structures 256A and 256B are formed.

In FIG. 26, a patterned hard mask layer 258 is formed over the verticalchannel layer 208A, the dielectric layers 218, 228 and 244, the bodyterminal 252 and the semiconductor structures 256A and 256B, and a dualepitaxial process is performed to form semiconductor structures 260A and260B respectively on the vertical channel layer 208B and the bodyterminal 248. As shown in FIG. 26, the vertical channel layer 208B andthe body terminal 252 are uncovered by the patterned hard mask layer258. The patterned hard mask layer 258 may be formed from one or moredielectric materials, such as silicon oxide, silicon nitride, siliconoxynitride, silicon carbon nitride, silicon oxycarbonitride, titaniumnitride, and/or the like. The semiconductor structures 260A and 260B maybe formed by epitaxially growing a semiconductor material, such assilicon, germanium, silicon germanium, silicon carbide, siliconphosphoric, silicon phosphoric carbide, a III-V material such as indiumphosphoric, gallium arsenide, aluminum arsenide, indium arsenide,aluminum indium arsenide, gallium indium arsenide, indium antimonide,gallium antimonide and indium gallium antimonide, combinations thereof,or the like. In addition, the semiconductor structure 260A may be dopedor heavily doped with P-type dopants, such as boron, boron fluoride,silicon, germanium, carbon, zinc, cadmium, beryllium, magnesium, indium,combinations thereof, and/or the like, while the semiconductor structure260B may be doped or heavily doped with N-type dopants, such asphosphorus, arsenic, silicon, germanium, carbon, oxygen, sulfur,selenium, tellurium, antimony, combinations thereof, and/or the like.The patterned hard mask layer 258 is removed after the semiconductorstructures 260A and 260B are formed.

FIG. 27 is a schematic cross-sectional diagram of a semiconductor device300 in accordance with some embodiments of the present disclosure. Asshown in FIG. 27, the left part of the semiconductor device 300(including a substrate 302, a well 304, a first source/drain structure306, a dielectric layer 308, a silicide feature 310, a vertical channellayer 312, a gate structure 314, a second source/drain structure 316, aliner layer 322 and a silicide feature 324) is similarly to the leftpart of the semiconductor device 100 (including the substrate 102, thewell 104A, the first source/drain structure 106A, the dielectric layer108, the silicide feature 110, the vertical channel layer 112, the gatestructure 114, the second source/drain structure 116, the liner layer124 and the silicide feature 126) shown in FIG. 1A, and the details arenot repeated herein.

In particular, the semiconductor device 300 includes a body structuredifferent from the body structure of the semiconductor device 100. Thebody structure of the semiconductor device 300 is in contact with thevertical channel layer 312 and opposite to the gate structure 314. Thebody structure includes a body epitaxial layer 318 and a body terminal320 stacked on the body epitaxial layer 318, and may be formed by one ormore epitaxial growth processes. The body epitaxial layer 318 bordersthe other portion of the sidewalls of the vertical channel layer 312that is not surrounded by the gate structure 314. In the embodimentswhere the semiconductor device 300 is a P-type FET, the body epitaxiallayer 318 may include essential germanium or silicon germanium and maybe implanted with P-type dopants, such as boron, boron fluorine,aluminum, gallium, indium, combinations thereof, and/or the like.Oppositely, in the embodiments where the semiconductor device 300 is anN-type FET, the body epitaxial layer 318 may include essential siliconand may be implanted with N-type dopants, such as phosphorus, arsenic,antimony, combinations thereof, and/or the like. The body epitaxiallayer 318 may have a trapezoidal shape, a rectangular shape or anothersimilar shape in its cross-sectional view. A dopant concentration of thebody epitaxial layer 318 may be about 10¹⁸ atoms/cm³ to about 10²²atoms/cm³, depending on various threshold voltage design requirements.

The body terminal 320 is above and in contact with the body epitaxiallayer 318. In the embodiments where the semiconductor device 300 is aP-type FET, the body terminal 320 may include essential silicon and maybe implanted with N-type dopants, such as phosphorus, arsenic, antimony,combinations thereof, and/or the like. Oppositely, in the embodimentswhere the semiconductor device 300 is an N-type FET, the body terminal320 terminal may include essential germanium or silicon germanium andmay be implanted with P-type dopants, such as boron, boron fluorine,aluminum, gallium, indium, combinations thereof, and/or the like. Insome embodiments, a dopant concentration of the body terminal 320 may beabout 10¹⁸ atoms/cm³ to about 10²² atoms/cm³, depending on variousthreshold voltage design requirements.

A silicide feature 326 is above and in contact with the body terminal320 for electrically connection with another device. The silicidefeature 324 may include a conductive material, for example, titanium,nickel, platinum, cobalt, combinations thereof, or the like.

An interconnect feature 328 are above and in contact with the silicidefeature 326, for electrically coupling the body structure with externaldevices. The interconnect feature 328 may include one or more layers ofmetal lines and/or vias. The interconnect feature 328 may include aconductive material such as copper, aluminum, nickel, titanium,tungsten, combinations thereof, and/or another suitable conductivematerial. Although not shown in FIG. 27, it is known that otherinterconnect features may be above and in contact with the silicidefeatures 310 and 324 for electrically coupling the first source/drainstructure 306 and the second source/drain structure 316 with externaldevices.

Furthermore, the semiconductor device 300 may further include one ormore hard mask layers 330 in its structure. The hard mask layers 330 mayinclude one or more dielectric materials, such as silicon oxide, siliconnitride, silicon oxynitride, silicon carbon nitride, siliconoxycarbonitride, titanium nitride, and/or the like.

In accordance with some embodiments, a semiconductor device includes asubstrate, a well on the substrate and an FFT on the well. The FETincludes a first source/drain structure, a vertical channel layer, agate structure, a second source/drain structure and a body structure.The first source/drain is on the well. The vertical channel layerextends form the first source/drain and has dopants of a first type. Thefirst gate structure surrounds a first portion of sidewalls of thevertical channel layer. The second source/drain is on the verticalchannel layer. The first body structure is in physical contact with thevertical channel layer, and includes a body epitaxial layer and a bodyterminal. The body epitaxial layer borders a second portion of thesidewalls of the vertical channel layer that is not surrounded by thegate structure, and has dopants of a second type that is different fromthe first type. The body terminal is in contact with the body epitaxiallayer, and has dopants of a third type that is the same as the firsttype.

In accordance with certain embodiments, a method of forming asemiconductor device includes the following steps. A substrate isprovided. A well is formed on the substrate. A semiconductor layer isformed on the well. A first portion of the semiconductor layer is formedas a first source/drain structure. A channel layer is formed on thefirst source/drain structure. The channel layer is formed having dopantsof a first type. A vertical channel layer is formed by patterning thechannel layer. A gate structure is formed surrounding a first portion ofsidewalls of the vertical channel layer. A first epitaxial process isperformed to form a body epitaxial layer bordering a second portion ofthe sidewalls of the vertical channel layer that is not surrounded bythe gate structure. The body epitaxial layer is formed having dopants ofa second type different from the first type. A second epitaxial growthprocess is performed to form a body terminal in physical contact thebody epitaxial layer. A third epitaxial growth process is performed toform a second source/drain structure on the vertical channel layer. Thebody terminal is formed having dopants of a third type the same as thefirst type.

In accordance with some embodiments, a method of forming a semiconductordevice includes the following steps. A substrate is provided having afirst region and a second region. A first well and a second well areformed on the substrate and respectively in the first region and in thesecond region. A first semiconductor layer and a second semiconductorlayer are respectively formed on the first well and the second well. Afirst channel layer and a second channel layer are respectively formedon the first semiconductor layer and the second semiconductor layer. Thefirst channel layer is formed having dopants of a first type, and thesecond channel layer is formed having dopants of a second type differentfrom the first type. The first channel layer and the second channellayer are patterned to form a vertical channel layer of a first FET inthe first region and a vertical channel layer of a second FET in thesecond region. An etching process is performed to the firstsemiconductor layer, the second semiconductor layer, the first well andthe second well to form a first STI at a boundary between the firstregion and the second region. A first portion of the remained firstsemiconductor layer in the first region is a first source/drainstructure of the first FET, and a first portion of the remained secondsemiconductor layer in the second region is a first source/drainstructure of the second FET. A gate structure of the first FET is formedin the first region, and a gate structure of the second FET is formed inthe second region; the gate structures respectively surrounding a firstportion of sidewalls of the vertical channel layer of the first FET anda first portion of sidewalls of the vertical channel layer of the secondFET. A first epitaxial growth process is performed to form a first bodyepitaxial layer bordering a second portion of the sidewalls of thevertical channel layer of the first FET that is not surrounded by thegate structure of the first FET and a second body epitaxial layerbordering a second portion of the sidewalls of the vertical channellayer of the second FET that is not surrounded by the gate structure ofthe second FET. The first body epitaxial layer is formed having dopantsof a third type different from the first type, and the second bodyepitaxial layer is formed having dopants of a fourth type different fromthe second type. A second epitaxial growth process is performed to forma first body terminal in physical contact with the first body epitaxiallayer and a second source/drain structure of the second FET on thevertical channel layer of the second FET. The first body terminal isformed having dopants of a fifth type the same as the first type. Athird epitaxial growth process is performed to form a secondsource/drain structure of the first FET on the vertical channel layer ofthe first FET and a second body terminal in physical contact with thesecond body epitaxial layer. The second body terminal is formed havingdopants of a sixth type the same as the second type.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor device, comprising: a substrate;a first well on the substrate; a first field effect transistor (FET) onthe first well, the first FET comprising: a first source/drain structureon the first well; a first vertical channel layer extending from thefirst source/drain structure, the vertical channel layer having dopantsof a first type; a first gate structure surrounding a first portion ofsidewalls of the vertical channel layer; a second source/drain structureon the vertical channel layer; and a first body structure in physicalcontact with the vertical channel layer, the body structure comprising:a body epitaxial layer bordering a second portion of the sidewalls ofthe vertical channel layer, wherein the body epitaxial layer extendsagainst the first gate structure and has dopants of a second type thatis different from the first type; and a body terminal in contact withthe body epitaxial layer, the body terminal having dopants of a thirdtype that is the same as the first type.
 2. The semiconductor device ofclaim 1, wherein the body terminal at least vertically covers the bodyepitaxial layer.
 3. The semiconductor device of claim 1, wherein thebody terminal is in horizontal contact with the body epitaxial layer. 4.The semiconductor device of claim 3, further comprising: a body well onthe substrate; and a semiconductor layer vertically disposed between thebody well and the body terminal.
 5. The semiconductor device of claim 4,further comprising: a shallow trench isolation (STI) disposed betweenthe first well and the body well and between the first source/drainstructure and the semiconductor layer.
 6. The semiconductor device ofclaim 1, further comprising: a second well on the substrate andphysically separated from the first well; and a second FET on the secondwell, the second FET comprising: a third source/drain structure on thesecond well; a second vertical channel layer extending from the thirdsource/drain structure, the second vertical channel layer having dopantsof a fourth type different from the first type; a second gate structuresurrounding a first portion of sidewalls of the second vertical channellayer; a fourth source/drain structure on the vertical channel layer ofthe second FET; and a second body structure in physical contact with thevertical channel layer of the second FET, the second body structurecomprising: a body epitaxial layer bordering a second portion of thesidewalls of the vertical channel layer of the second FET that is notsurrounded by the gate structure of the second FET, the body epitaxiallayer of the second FET having dopants of a fifth type different fromthe first type; and a body terminal in contact with the body epitaxiallayer of the second FET, the body terminal of the second FET havingdopants of a sixth type the same as the fourth type.
 7. Thesemiconductor device of claim 6, wherein the gate structure of the firstFET is in physical contact with the gate structure of the second FET. 8.A method of forming a semiconductor device, comprising: providing asubstrate; forming a well on the substrate; forming a semiconductorlayer on the well, wherein a first portion of the semiconductor layer isformed as a first source/drain structure; forming a channel layer on thefirst source/drain structure, the channel layer formed having dopants ofa first type; patterning the channel layer to form a vertical channellayer; forming a gate structure surrounding a first portion of sidewallsof the vertical channel layer; performing a first epitaxial process toform a body epitaxial layer bordering a second portion of the sidewallsof the vertical channel layer that is not surrounded by the gatestructure, the body epitaxial layer formed having dopants of a secondtype different from the first type; performing a second epitaxial growthprocess to form a body terminal in physical contact the body epitaxiallayer, the body terminal formed having dopants of a third type the sameas the first type; and performing a third epitaxial growth process toform a second source/drain structure on the vertical channel layer. 9.The method of claim 8, wherein the vertical channel layer is patternedto further form the body terminal in horizontal physical contact withthe body epitaxial layer.
 10. The method of claim 9, further comprising:implanting the body terminal before performing the second epitaxialgrowth process.
 11. The method of claim 9, wherein the firstsource/drain structure is formed by performing an etching process on thesemiconductor layer and the well, and wherein a second portion of theremained semiconductor layer and a portion of the well are locatedvertically between the substrate and the body terminal after the etchingprocess.
 12. The method of claim 8, wherein forming the gate structurecomprising: performing one or more metal patterning processes on thegate structure to form one or more work function metal layers.
 13. Themethod of claim 8, wherein the body terminal is formed at leastvertically covering the body epitaxial layer.
 14. A method of forming asemiconductor device, comprising: providing a substrate having a firstregion and a second region; forming a first well and a second well onthe substrate, wherein the first well and the second well arerespectively in the first region and in the second region; forming afirst semiconductor layer and a second semiconductor layer respectivelyon the first well and the second well; forming a first channel layer anda second channel layer respectively on the first semiconductor layer andthe second semiconductor layer, wherein the first channel layer isformed having dopants of a first type, and wherein the second channellayer is formed having dopants of a second type different from the firsttype; patterning the first channel layer and the second channel layer toform a vertical channel layer of a first field effect transistor (FET)in the first region and a vertical channel layer of a second FET in thesecond region; performing an etching process to the first semiconductorlayer, the second semiconductor layer, the first well and the secondwell to form a first STI at a boundary between the first region and thesecond region, wherein a first portion of the remained firstsemiconductor layer in the first region being a first source/drainstructure of the first FET, and wherein a first portion of the remainedsecond semiconductor layer in the second region being a firstsource/drain structure of the second FET; forming a gate structure ofthe first FET in the first region and a gate structure of the second FETin the second region, the gate structures respectively surrounding afirst portion of sidewalls of the vertical channel layer of the firstFET and a first portion of sidewalls of the vertical channel layer ofthe second FET; performing a first epitaxial growth process to form afirst body epitaxial layer bordering a second portion of the sidewallsof the vertical channel layer of the first FET that is not surrounded bythe gate structure of the first FET and a second body epitaxial layerbordering a second portion of the sidewalls of the vertical channellayer of the second FET that is not surrounded by the gate structure ofthe second FET, wherein the first body epitaxial layer is formed havingdopants of a third type different from the first type, and wherein thesecond body epitaxial layer is formed having dopants of a fourth typedifferent from the second type; performing a second epitaxial growthprocess to form a first body terminal in physical contact with the firstbody epitaxial layer and a second source/drain structure of the secondFET on the vertical channel layer of the second FET, wherein the firstbody terminal is formed having dopants of a fifth type the same as thefirst type; and performing a third epitaxial growth process to form asecond source/drain structure of the first FET on the vertical channellayer of the first FET and a second body terminal in physical contactwith the second body epitaxial layer, wherein the second body terminalis formed having dopants of a sixth type the same as the second type.15. The method of claim 14, wherein the first vertical channel layer ispatterned to further form the first body terminal in horizontal physicalcontact with the first body epitaxial layer, and wherein the secondvertical channel layer is patterned to further form the second bodyterminal in horizontal physical contact with the second body epitaxiallayer.
 16. The method of claim 15, further comprising: implanting thefirst body terminal before performing the second epitaxial growthprocess; and implanting the second body terminal before performing thesecond epitaxial growth process.
 17. The method of claim 15, wherein theetching process is performed to further form the first source/drainstructures of the first FET and the second FET, and wherein, after theetching process, a second portion of the remained first semiconductorlayer and a portion of the first well are located vertically between thesubstrate and the first body terminal, and a second portion of theremained second semiconductor layer and a portion of the second well arelocated vertically between the substrate and the second body terminal.18. The method of claim 14, wherein forming the gate structures of thefirst FET and the second FET comprising: performing one or more metalpatterning processes on the gate structures of the first FET and thesecond FET to form one or more work function metal layers.
 19. Themethod of claim 14, wherein the first body terminal is formed at leastvertically covering the first body epitaxial layer, and wherein thesecond body terminal is formed at least vertically covering the secondbody epitaxial layer.
 20. The method of claim 14, wherein the gatestructures of the first FET and the second FET are formed in physicalcontact with each other.